CrossBeam system AURIGA Compact: „dual beam“ Focused ion beam microscope for precise structural and chemical analysis, 2D, 3D high resolution imaging (combined secondary electrons secondary ion detector, 4-quadrant solid state BSE detector, 3D EDS analysis, In-lens duo and multi-mode STEM detectors) and for micro/nano machining. SEM (scanning electron microscopy) Resolution 0.9 nm at 30kV (STEM mode), 2.5 nm at 1kV Magnification 12x - 900 000x FIB (focused ion beam) Resolution 5 nm (30kV, 1pA) Magnification 600x - 500 000x

            
AURIGA^TM CrossBeam®: GEMINI® electron beam SEM (middle),
ion beam FIB (left) and gas injection system  GIS (right)

Applications:

• 2D and 3D  imaging and analysis of conductive and nanoconductive materials with using of local charge compensator
  
• Ultra thin lamella preparation (<50 nm) for TEM (at any location of materials which are extremely difficult to prepare with another way  - worm surfaces, oxidation, under the indenter...)
• Milling, implantation, ion-induced deposition, ion assisted etching of materials
  
• FIB litography
• Analysis of cross sections, sub surfaces damage, cracking, oxidation, wear, corrosion, study of profile and associated plastic deformation of nanoindentations etc.
  
• Preparation of micro pillars for further nanomechanical testing
  
  

IMR SAS
Watsonova 47, 040 01 Košice
Tel.: +421-55-7922 453
Fax: +421-55-7922 408
www.imr.saske.sk